Post "O 1s from HfO/SiO/Si. To be used in the 9/22 SMCTSM conference course on XPS fitting"

forum: O 1s

from: Dr. Alberto Herrera-Gomez

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  • O 1s from HfO/SiO/Si. To be used in the 9/22 SMCTSM conference course on XPS fitting (O 1s forum)

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    Information about the sample:

    • Shape: Flat Surface

    • Sample material: HfO/SiO/Si

    • Elements: Hf, O, Si

    Data acquisition parameters:

    • Photon source: Al Ka (monochromatic)

    • Pass energy: 10

    • Take-off angle: 85

    Equipment and analysis software:

    • Brand: ThermoFisher

    • Model: Alpha 110

    • Spectrometer mode: small area, large angle

    xpsoasis_660_image_100.png

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Alberto Herrera-Gomez

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