Marisol Mayorga-Garay

Information about the sample:

• Shape: Flat surface

• Sample material: HfO2

• Elements: Hf, Si, O

• Sample composition: HfO2/HfSiO2

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfON

• Elements: Si, Hf, O and N

• Sample composition: HfO1.66N0.33

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfO2

• Elements: Hf, Si, O

• Sample composition: HfO2/HfSiO2

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfON/Si

• Elements: Si, Hf, O and N

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfO2

• Elements: Hf, Si, O

• Sample composition: HfO2/HfSiO2

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfON/Si

• Elements: Si, Hf, O and N

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: Mn Met

• Elements: Mn

• Sample composition: Mn

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

• Take-off angle: 85

Equipment and analysis software:

• Brand: ThermoFisher

• Model: Alpha 110

• Spectrometer mode: Small area large angle

• Software used: AAnalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: Metallic Mn

• Elements: Mn, O

Data acquisition parameters:

• Photon source: Al Ka monochromatic

Equipment and analysis software:

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfON/Si

• Elements: Si, Hf, O and N

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer

Information about the sample:

• Shape: Flat surface

• Sample material: HfO2

• Elements: Hf, Si, O

• Sample composition: HfO2/HfSiO2

Data acquisition parameters:

• Photon source: Al Ka monochromatic

• Pass energy: 10

Equipment and analysis software:

• Brand: ThermoFisher Scientific

• Model: Alpha 110

• Software used: aanalyzer