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  • Nitridation of HfO2/Si
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    Files :

    • You must be logged-in to download data

    Information about the sample:

    • Shape: Flat surface

    • Sample material: HfON/Si

    • Elements: Si, Hf, O and N

    Data acquisition parameters:

    • Photon source: Al Ka monochromatic

    • Pass energy: 10

    Equipment and analysis software:

    • Brand: ThermoFisher Scientific

    • Model: Alpha 110

    • Software used: aanalyzer

    aanalyzer_876_image_14.jpg
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    Files :

    • You must be logged-in to download data

    Information about the sample:

    • Shape: Flat surface

    • Sample material: TiN

    • Elements: N

    • Sample composition: TiN

    Data acquisition parameters:

    • Photon source: Al Ka monochromatic

    • Pass energy: 10

    • Take-off angle: 85

    Equipment and analysis software:

    • Brand: Thermofisher

    • Model: Alpha 110

    • Spectrometer mode: MONOXPS

    • Software used: AAnalyzer

    xpsoasis_404_image_100.jpg

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