from HfO2/SiO2 (O 1s forum)
Shape: Flat Surface
Sample material: HfO2/SiO2/Si
Elements: Si, O, Hf
Sample composition: HfO2/SiO2
Photon source: Al Ka (monochromatic)
Pass energy: 10
Take-off angle: 85
Brand: ThermoFisher
Model: Alpha 110
Spectrometer mode: small area, large angle