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    Files :

    • You must be logged-in to download data

    Equipment and analysis software:

    • Software used: AAnalyzer

    AAnalyzer_1263_image_14.jpg
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    Files :

    • You must be logged-in to download data

    Equipment and analysis software:

    • Software used: AAnalyzer

    AAnalyzer_1262_image_14.jpg
  • Read more

    Files :

    • You must be logged-in to download data

    Equipment and analysis software:

    • Software used: AAnalyzer

    AAnalyzer_1261_image_14.jpg
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    Files :

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    Information about the sample:

    • Shape: Flat surface

    • Sample material: HfO2

    • Elements: Hf, Si, O

    • Sample composition: HfO2/HfSiO2

    Data acquisition parameters:

    • Photon source: Al Ka monochromatic

    • Pass energy: 10

    Equipment and analysis software:

    • Brand: ThermoFisher Scientific

    • Model: Alpha 110

    • Software used: aanalyzer

    aanalyzer_877_image_14.jpg
  • Nitridation of HfO2/Si
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    Files :

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    Information about the sample:

    • Shape: Flat surface

    • Sample material: HfON/Si

    • Elements: Si, Hf, O and N

    Data acquisition parameters:

    • Photon source: Al Ka monochromatic

    • Pass energy: 10

    Equipment and analysis software:

    • Brand: ThermoFisher Scientific

    • Model: Alpha 110

    • Software used: aanalyzer

    aanalyzer_874_image_14.jpg
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    Files :

    • You must be logged-in to download data

    Equipment and analysis software:

    • Software used: aanalyzer

    aanalyzer_713_image_14.jpg
  • This is the cleanest si we could get. It is H-terminated.
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    Files :

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    Equipment and analysis software:

    • Software used: aanalyzer

    aanalyzer_712_image_14.jpg
  • download the data, fit it, and post it as a comment
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    Files :

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    Information about the sample:

    • Shape: Flat Surface

    • Sample material: clean silicon

    • Elements: Si

    • Sample composition: Si

    Data acquisition parameters:

    • Photon source: Al Ka (monochromatic)

    • Pass energy: 10

    • Take-off angle: 85

    Equipment and analysis software:

    • Brand: ThermoFisher

    • Model: Alpha 110

    • Spectrometer mode: small area, large angle

    xpsoasis_664_image_100.png
  • download the data, fit it, and post it as a comment
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    Files :

    • You must be logged-in to download data

    Information about the sample:

    • Shape: Flat Surface

    • Sample material: SiO2/Si

    • Elements: Si, O

    Data acquisition parameters:

    • Photon source: Al Ka (monochromatic)

    • Pass energy: 10

    • Take-off angle: 85

    Equipment and analysis software:

    • Brand: ThermoFisher

    • Model: Alpha 110

    • Spectrometer mode: small area, large angle

    xpsoasis_663_image_100.png
  • Growth in RTA @800°C by 290s, then etching, this data corresponds to the last etching at 1800s. ARXPS 0-65°
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    Information about the sample:

    • Shape: Flat Surface

    • Sample material: Si wafer

    • Elements: Si2p

    • Sample composition: SiOx

    Data acquisition parameters:

    • Photon source: Al Ka (monochromatic)

    • Pass energy: 20

    • Take-off angle: 0-65

    Equipment and analysis software:

    • Brand: SPECS

    • Model: Phoibos 150

    • Spectrometer mode: MediumArea:1.5kV

    • Software used: Analyzer

    xpsoasis_477_image_100.png

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